Concepedia

F. R. Ashley

FR

1

Publications

18

Citations

1

H-Index

1975

Active since

F. R. Ashley is an author specializing in calibration, microfabrication, and instrumentation.

Top concepts

Publications per year

1975–1975

1

Publications

1

Control system design and alignment methods for electron lithography

D. S. Alles, F. R. Ashley, A. M. Johnson et al. · Journal of Vacuum Science and Technology · 1975 · 18 citations

, , +18

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