Concepedia

Alexander R. Giehl

AR

Statistics

Publications

2

Citations

25

H-Index

2

Active since

2003

Affiliations

University of Kaiserslautern(Current)

Alexander R. Giehl is an author at University of Kaiserslautern specializing in materials engineering, engineering, and deep etching.

Publications per year

2003–2003

2

Publications

2

Deep reactive ion etching of GaSb in Cl<sub>2</sub>/Ar-plasma discharges using single-layer soft mask technologies

Alexander R. Giehl, M. Kessler, Axel Grosse et al. · Journal of Micromechanics and Microengineering · 2003 · 13 citations

, , +17

Deep dry etching of GaAs and GaSb using Cl2/Ar plasma discharges

Alexander R. Giehl, Michael Gumbel, M. Kessler et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 12 citations

, , +17

1–2 of 2