Concepedia

S. Burgess

SB

Statistics

Publications

3

Citations

71

H-Index

3

Active since

2002

Affiliations

SPTS Technologies (United Kingdom)(Current)

S. Burgess is an author at SPTS Technologies (United Kingdom) specializing in electrical engineering, microelectronics, and engineering.

Top concepts

EngineeringMicroelectronicsElectrical EngineeringApplied PhysicsMaterial ScienceElectronic PackagingMaterials EngineeringThin Films3D PrintingDielectrics

Publications per year

2002–2010

3

Publications

3

Low temperature PECVD of dielectric films for TSV applications

Daniel Archard, K. Giles, Andrew Price et al. · 2010 · 42 citations

Dielectrics, Engineering, Step Coverage +16

Evaluation of Ta and TaN-based Cu diffusion barriers deposited by Advanced Hi-Fill (AHF) sputtering onto blanket wafers and high aspect ratio structures

S. Burgess, H Donohue, Keith Buchanan et al. · Microelectronic Engineering · 2002 · 15 citations

Materials Engineering, Materials Science, Electrical Engineering +11

3D IC Process integration challenges and solutions

Kevin Powell, S. Burgess, Tony Wilby et al. · 2008 · 14 citations

Process Integration, Engineering, Industrial Engineering +17

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