Concepedia

T-Y Chung

TC

Statistics

Publications

3

Citations

78

H-Index

3

Active since

2009

Affiliations

University of California, Berkeley(Current)

University of Maryland, College Park

T-Y Chung is an author at University of California, Berkeley specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

2009–2013

3

Publications

3

Deactivation of lipopolysaccharide by Ar and H<sub>2</sub>inductively coupled low-pressure plasma

Elliot A. J. Bartis, Christopher A. Barrett, T-Y Chung et al. · Journal of Physics D Applied Physics · 2013 · 33 citations

, , +17

Comparing 193 nm photoresist roughening in an inductively coupled plasma system and vacuum beam system

M. J. Titus, D. Nest, T-Y Chung et al. · Journal of Physics D Applied Physics · 2009 · 30 citations

, , +18

Role of polymer structure and ceiling temperature in polymer roughening and degradation during plasma processing: a beam system study of P4MS and PαMS

D. Nest, T-Y Chung, Joseph J. Végh et al. · Journal of Physics D Applied Physics · 2010 · 15 citations

, , +17

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