T-Y Chung - Concepedia

Author

T-Y Chung

Also Known As

T-Y Chung

Publications

Citations

H-Index

Concepts

All Affiliations

T-Y Chung is an author at University of California, Berkeley specializing in engineering, applied physics, and materials science.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	78
2	Applied Physics	2	2	45
3	Medicine	1	1	33
4	Natural Sciences	1	1	30
5	Biochemistry	1	1	33

T-Y Chung

Publications

Citations

H-Index

Page 1

	Year	Citations
Deactivation of lipopolysaccharide by Ar and H<sub>2</sub>inductively coupled low-pressure plasma Elliot A. J. Bartis, Christopher A. Barrett, T-Y Chung, Journal of Physics D Applied Physics Ultraviolet LightEngineeringPlasma MedicineBioanalysisPhototoxicity	2013	33
Comparing 193 nm photoresist roughening in an inductively coupled plasma system and vacuum beam system M. J. Titus, D. Nest, T-Y Chung, Journal of Physics D Applied Physics EngineeringPr SamplesVacuum DevicePlasma ProcessingOptical Properties	2009	30
Role of polymer structure and ceiling temperature in polymer roughening and degradation during plasma processing: a beam system study of P4MS and PαMS D. Nest, T-Y Chung, Joseph J. Végh, Journal of Physics D Applied Physics Optical MaterialsEngineeringResponsive PolymersCurrent Generation 193Plasma Processing	2010	15

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