Concepedia

Hal Kusunose

HK

Statistics

Publications

2

Citations

31

H-Index

2

Active since

2003

Affiliations

Intel (United States)(Current)

Hal Kusunose is an author at Intel (United States) specializing in microfabrication, microscopy, and applied physics.

Top concepts

Publications per year

2003–2007

2

Publications

2

EUV substrate and blank inspection with confocal microscopy

Jan-Peter Urbach, Jan Cavelaars, Hal Kusunose et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 20 citations

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Inspection with the Lasertec M7360 at the SEMATECH Mask Blank Development Center

Won-Il Cho, Patrick A. Kearney, Eric M. Gullikson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 11 citations

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