Kazuo Hirata

Sputter Synthesis of Ba₂YCu₃O_y As-Deposited Superconducting Thin Films from Stoichiometric Target–A Mechanism of Compositional Deviation and Its Control

Norio Terada, Hideo Ihara, Masatoshi Jo et al. · Japanese Journal of Applied Physics · 1988 · 88 citations

Superconducting Material, Engineering, Thin Film Process Technology +17

Preparation of Pb(Zr, Ti)O₃ Thin Films by Multi-Target Sputtering

Takashi Hase, Toshiyuki Sakuma, Yoichi Miyasaka et al. · Japanese Journal of Applied Physics · 1993 · 73 citations

Materials Science, Materials Engineering, Pzt Thin Films +13

Pb(Zr, Ti)O₃ Thin-Film Preparation by Multitarget Magnetron Sputtering

Kazuo Hirata, Naokichi Hosokawa, Takashi Hase et al. · Japanese Journal of Applied Physics · 1992 · 31 citations

Crystal Structure, Thin Film Physics, Optical Materials +19

Undercutting Phenomena in Al Plasma Etching

M. Oda, Kazuo Hirata · Japanese Journal of Applied Physics · 1980 · 21 citations

Materials Engineering, Materials Science, Sio 2 +14

Effects of Wet Cleaning on Si Contaminated with Heavy Metals during Reactive Ion Etching

Tetsuo Hosoya, Yoshiharu Ozaki, Kazuo Hirata · Journal of The Electrochemical Society · 1985 · 20 citations · Full text

Engineering, Silicon On Insulator, Mineral Processing +20