Japanese Journal of Applied Physics · 1988 · 88 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsSurface ScienceThin FilmsSuperconducting MaterialsSuperconducting Thin FilmsSurface PhysicsThin-film DepositionThin-film MaterialsCuprate SuperconductorsDeposition TechniquesSputter DepositionSputteringSuperconducting PropertiesThin-film SuperconductorsWork FunctionYttrium Barium Copper Oxide Films
A mechanism of compositional deviation of Ba-Y-Cu-O films during sputtering has been investigated, and a process for obtaining as-deposited superconducting films from a stoichiometric target has been developed. The main factor of the deviation is the radiation of high-energy electrons emitted from the oxide target with a low work function onto the growing surface. By eliminating the electron bombardment, films with the same composition were obtained reproducibly. As-grown films 4000 Å thick deposited at 580°C showed T c ( ρ=0) of 82.5 K and an excellent surface smoothness.
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