Concepedia

Gek Soon Chua

GS

3

Publications

43

Citations

3

H-Index

2008

Active since

Affiliations

GlobalFoundries (Singapore)(Current)

GlobalFoundries (United States)

Gek Soon Chua is an author at GlobalFoundries (Singapore) specializing in engineering, computer engineering, and computer-aided design.

Top concepts

EngineeringComputer EngineeringComputational ImagingComputer-aided DesignMedicineDosimetryRadiology3D PrintingCalibrationOphthalmology

Publications per year

2008–2014

3

Publications

3

Optimization of mask shot count using MB-MDP and lithography simulation

Gek Soon Chua, Wei Long Wang, Byoung Il Choi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 17 citations

Engineering, Mask Shapes, Computer Engineering +5

Customized illumination shapes for 193nm immersion lithography

Moh Lung Ling, Gek Soon Chua, Qunying Lin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 16 citations

Geometric Modeling, Illumination Modeling, Engineering +12

Mask model calibration for MPC applications utilizing shot dose assignment

Ingo Bork, Peter Buck, Sankaranarayanan Paninjath et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 10 citations

Image Analysis, Engineering, Medical Imaging +13

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