5
Publications
112
Citations
5
H-Index
2001
Active since
Affiliations
C. Santeufemio is an author at University of Florida specializing in engineering, surface science, and applied physics.
Top concepts
EngineeringSurface ScienceApplied PhysicsPhysicsMicrofabricationGeologyCosmic RayGeophysicsMicroscopyAtomic Physics
Publications per year
2001–2003
5
5
Craters on silicon surfaces created by gas cluster ion impacts
L.P. Allen, D. B. Fenner, C. Santeufemio et al. · Journal of Applied Physics · 2002 · 55 citations
Substrate smoothing using gas cluster ion beam processing
L.P. Allen, D. B. Fenner, Vincent DiFilippo et al. · Journal of Electronic Materials · 2001 · 15 citations
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