Vincent DiFilippo

Etching, smoothing, and deposition with gas-cluster ion beam technology

James A. Greer, D. B. Fenner, J. Hautala et al. · Surface and Coatings Technology · 2000 · 19 citations

Materials Science, Engineering, Microfabrication +4

Substrate smoothing using gas cluster ion beam processing

L.P. Allen, D. B. Fenner, Vincent DiFilippo et al. · Journal of Electronic Materials · 2001 · 15 citations

Ion Implantation, Engineering, Microfabrication +5

Etching and Surface Smoothing with Gas-Cluster Ion Beams

D. B. Fenner, R. Torti, L.P. Allen et al. · MRS Proceedings · 1999 · 13 citations

Engineering, Microfabrication, Surface Science +6

<title>Ion beam nanosmoothing of sapphire and silicon carbide surfaces</title>

D. B. Fenner, Vincent DiFilippo, J.R.J. Bennett et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 10 citations

Engineering, Ion Beam Instrumentation, Silicon Carbide Surfaces +17