Statistics
Publications
7
Citations
208
H-Index
7
Active since
1980
Affiliations
Isamu Kato is an author at Waseda University specializing in natural sciences, materials science, and semiconductor materials.
Publications per year
1980–1998
7
7
Microwave Plasma CVD System for the Fabrication of Thin Solid Films
Isamu Kato, S. Wakana, Shinji Hara et al. · Japanese Journal of Applied Physics · 1982 · 27 citations
1–5 of 7