Kyung Suk Min

Study on the etching characteristics of amorphous carbon layer in oxygen plasma with carbonyl sulfide

Jong Kyu Kim, Sung Il Cho, Nam Gun Kim et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 40 citations

Engineering, Carbonyl Sulfide, Silicon On Insulator +16

Time‐Resolved Electroluminescence Study for the Effect of Charge Traps on the Luminescence Properties of Organic Light‐Emitting Diodes

Jooyoun Kang, Jung Bae Son, Gyeong Woo Kim et al. · physica status solidi (a) · 2020 · 34 citations

Engineering, Organic Electronics, Trel Curve +18

Atomic layer etching removal of damaged layers in a contact hole for low sheet resistance

Jong Kyu Kim, Sung‐Il Cho, Sung Ho Lee et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 21 citations

Engineering, Mechanical Engineering, Silicon On Insulator +18

Strain‐Induced Modulation of Localized Surface Plasmon Resonance in Ultrathin Hexagonal Gold Nanoplates

Gyeong‐Su Park, Kyung Suk Min, HyukSang Kwon et al. · Advanced Materials · 2021 · 20 citations

Damaged silicon contact layer removal using atomic layer etching for deep-nanoscale semiconductor devices

Jong Kyu Kim, Sung‐Il Cho, Sung Ho Lee et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 11 citations

Depth Control, Engineering, Silicon On Insulator +19