Concepedia

Jong Kyu Kim

JK

2

Publications

70

Citations

2

H-Index

2013

Active since

Affiliations

Sungkyunkwan University(Current)

Samsung (South Korea)

Jong Kyu Kim is an author at Sungkyunkwan University specializing in applied physics, microfabrication, and engineering.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationMaterials EngineeringIntegrated CircuitsChemical EngineeringElectronic Packaging

Publications per year

2013–2014

2

Publications

2

Study on the etching characteristics of amorphous carbon layer in oxygen plasma with carbonyl sulfide

Jong Kyu Kim, Sung Il Cho, Nam Gun Kim et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 40 citations

Engineering, Carbonyl Sulfide, Silicon On Insulator +16

Study on contact distortion during high aspect ratio contact SiO2 etching

Jong Kyu Kim, Sung Ho Lee, Sung‐Il Cho et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 30 citations

Engineering, Pattern Transfer, Integrated Circuits +17

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