Statistics
Publications
3
Citations
54
H-Index
3
Active since
2015
Affiliations
Applied Materials (United States)(Current)
Nikos Bekiaris is an author at Applied Materials (United States) specializing in materials engineering, electronic materials, and semiconductor devices.
Publications per year
2015–2018
3
3
PVD- Treated ALD TaN for Cu Interconnect Extension to 5nm Node and Beyond
Zhiyuan Wu, Rui Li, Xiangjin Xie et al. · 2018 · 22 citations
Natural Sciences, Materials Engineering, Materials Science +17
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