Concepedia

B.J. Park

BP

Statistics

Publications

1

Citations

28

H-Index

1

Active since

2003

Affiliations

Sungkyunkwan University(Current)

B.J. Park is an author at Sungkyunkwan University specializing in semiconductor devices, materials science, and ceramics.

Publications per year

2003–2003

1

Publications

1

High rate etching of 6H–SiC in SF6-based magnetically-enhanced inductively coupled plasmas

D.W. Kim, Hyoyoung Lee, B.J. Park et al. · Thin Solid Films · 2003 · 28 citations

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