Concepedia

A. H. Eltoukhy

AH

16

Publications

602

Citations

13

H-Index

1977

Active since

Affiliations

University of Illinois Urbana-Champaign(Current)

Urbana University

United States Drug Testing Laboratories

A. H. Eltoukhy is an author at University of Illinois Urbana-Champaign specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsCrystalline DefectsPhysicsSurface ScienceMaterials EngineeringMicrostructureMicroelectronics

Publications per year

1977–1981

16

Publications

16

Diffusion enhancement due to low-energy ion bombardment during sputter etching and deposition

A. H. Eltoukhy, J. E. Greene · Journal of Applied Physics · 1980 · 97 citations

Engineering, Thin Film Process Technology, Chemical Deposition +20

Mechanisms of reactive sputtering of indium I: Growth of InN in mixed Ar-N2 discharges

Bharath Natarajan, A. H. Eltoukhy, J. E. Greene et al. · Thin Solid Films · 1980 · 92 citations

Materials Engineering, Electrical Engineering, Engineering +9

Growth of single-crystal metastable semiconducting (GaSb)1−<i>x</i>Ge<i>x</i> films

Ken Cadien, A. H. Eltoukhy, J. E. Greene · Applied Physics Letters · 1981 · 73 citations

Materials Engineering, Semiconductors, Materials Science +13

Compositionally modulated sputtered InSb/GaSb superlattices: Crystal growth and interlayer diffusion

A. H. Eltoukhy, J. E. Greene · Journal of Applied Physics · 1979 · 57 citations

Engineering, Crystal Growth Technology, Thin Film Process Technology +16

Mechanisms of reactive sputtering of indium III: A general phenomenological model for reactive sputtering

A. H. Eltoukhy, Bharath Natarajan, J. E. Greene et al. · Thin Solid Films · 1980 · 52 citations

Materials Science, Materials Engineering, Engineering +8

Rows per page

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