Concepedia

Yuki Kikuchi

YK

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Publications

1

Citations

10

H-Index

1

Active since

2018

Affiliations

Center for Nanoscale Science and Technology(Current)

Yuki Kikuchi is an author at Center for Nanoscale Science and Technology specializing in etch damage, etching processes, and microelectronics.

Publications per year

2018–2018

1

Publications

1

Low-<i>k</i> dielectric etch challenges at the 7 nm logic node and beyond: Continuous-wave versus quasiatomic layer plasma etching performance review

Katie Lutker-Lee, Yen-Tien Lu, Qiaowei Lou et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2018 · 10 citations

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