Statistics
Publications
2
Citations
80
H-Index
2
Active since
2004
Affiliations
Tim Fuehner is an author at Fraunhofer Institute for Integrated Systems and Device Technology specializing in mask design, additive manufacturing, and manufacturing engineering.
Publications per year
2004–2013
2
2
Toward automatic mask and source optimization for optical lithography
Andreas Erdmann, Tim Fuehner, Thomas Schnattinger et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 60 citations
Engineering, Manufacturing Engineering, Additive Manufacturing +14
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