Statistics
Publications
1
Citations
34
H-Index
1
Active since
1997
Affiliations
Chan-Yong Hwang is an author at Korea Research Institute of Standards and Science specializing in chemical kinetics, metal etching, and etching processes.
Publications per year
1997–1997
1
1
Reactive Ion Etching Mechanism of Copper Film in Chlorine-based Electron Cyclotron Resonance Plasma
Sung-Kwon Lee Sung-Kwon Lee, Sung-Soon Chun Sung-Soon Chun, Chan-Yong Hwang et al. · Japanese Journal of Applied Physics · 1997 · 34 citations
Natural Sciences, Materials Engineering, Materials Science +15
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