Statistics
Publications
2
Citations
102
H-Index
2
Active since
1997
Affiliations
Sung-Kwon Lee Sung-Kwon Lee is an author at Korea Advanced Institute of Science and Technology specializing in materials science, materials engineering, and natural sciences.
Publications per year
1997–2004
2
2
Reactive Ion Etching Mechanism of Copper Film in Chlorine-based Electron Cyclotron Resonance Plasma
Sung-Kwon Lee Sung-Kwon Lee, Sung-Soon Chun Sung-Soon Chun, Chan-Yong Hwang et al. · Japanese Journal of Applied Physics · 1997 · 34 citations
Natural Sciences, Materials Engineering, Materials Science +15
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