Concepedia
1
Publications
20
Citations
H-Index
2004
Active since
Affiliations
Denka (Japan)(Current)
Yutaka Ohira is an author at Denka (Japan) specializing in engineering, air pollution, and environmental engineering.
Top concepts
EngineeringAir PollutionChemical EngineeringEnvironmental Engineering
Publications per year
2004–2004
The Possibility of Carbonyl Fluoride as a New CVD Chamber Cleaning Gas
Yuki Mitsui, Yutaka Ohira, Taisuke Yonemura et al. · Journal of The Electrochemical Society · 2004 · 20 citations
Chemical Engineering, Engineering, Decontamination +9
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