Toshikazu Ishigaki

Three Dimensional Stress Mapping of Silicon Surrounded by Copper Filled through Silicon Vias Using Polychromator-Based Multi-Wavelength Micro Raman Spectroscopy

A. D. Trigg, Li Yu, Cheng Kuo Cheng et al. · Applied Physics Express · 2010 · 49 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Design of Multi-Wavelength Micro Raman Spectroscopy System and Its Semiconductor Stress Depth Profiling Applications

Woo Sik Yoo, Kitaek Kang, Takeshi Ueda et al. · Applied Physics Express · 2009 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

Ultra-Thin SiO₂/Si Interface Quality In-Line Monitoring Using Multiwavelength Room Temperature Photoluminescence and Raman Spectroscopy

Woo Sik Yoo, Byoung Gyu Kim, Seung Woo Jin et al. · ECS Journal of Solid State Science and Technology · 2014 · 21 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Non-Contact and Non-Destructive Characterization Alternatives of Ultra-Shallow Implanted Silicon p-n Junctions by Multi-Wavelength Raman and Photoluminescence Spectroscopy

Woo Sik Yoo, Takeshi Ueda, Toshikazu Ishigaki et al. · Journal of The Electrochemical Society · 2010 · 18 citations

Engineering, Materials Engineering, Materials Science +17

Low temperature RTP for BCB curing

Michel Ouaknine, Igor J. Malik, Masato Odera et al. · Microelectronic Engineering · 2007 · 16 citations

Engineering, Materials Engineering, Materials Science +11