Hyungjoo Shin

Control of ion energy distributions using a pulsed plasma with synchronous bias on a boundary electrode

Hyungjoo Shin, Weiye Zhu, Lin Xu et al. · Plasma Sources Science and Technology · 2011 · 71 citations

Natural Sciences, Physics, Electromagnetics +10

Surprising importance of photo-assisted etching of silicon in chlorine-containing plasmas

Hyungjoo Shin, Weiye Zhu, Vincent M. Donnelly et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 60 citations

Natural Sciences, Materials Science, Physics +12

Ion energy distributions, electron temperatures, and electron densities in Ar, Kr, and Xe pulsed discharges

Hyungjoo Shin, Weiye Zhu, Demetre J. Economou et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 28 citations · Full text

Natural Sciences, Physics, Plasma Physics +14

Ion energy distributions in inductively coupled plasmas having a biased boundary electrode

Michael D. Logue, Hyungjoo Shin, Weiye Zhu et al. · Plasma Sources Science and Technology · 2012 · 24 citations · Full text

Natural Sciences, Materials Science, Physics +14

<i>In situ</i> plasma diagnostics study of a commercial high-power hollow cathode magnetron deposition tool

Liang Meng, Ramasamy Raju, Randolph Flauta et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 20 citations

Natural Sciences, Physics, Plasma Physics +12