Concepedia

Robert Chen

RC

Statistics

Publications

4

Citations

189

H-Index

4

Active since

2011

Affiliations

Applied Materials (United States)(Current)

Robert Chen is an author at Applied Materials (United States) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsOptoelectronicsPhysicsNanotechnologySemiconductorsNanoelectronicsQuantum Science

Publications per year

2011–2016

4

Publications

4

Strong enhancement of direct transition photoluminescence with highly tensile-strained Ge grown by molecular beam epitaxy

Yijie Huo, Hai Lin, Robert Chen et al. · Applied Physics Letters · 2011 · 130 citations

Wide-bandgap Semiconductor, Engineering, Optoelectronic Devices +17

EUVL multilayer mask blank defect mitigation for defect-free EUVL mask fabrication

Pei-yang Yan, Yan Liu, M. M. Kamna et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 24 citations

Materials Science, Wafer Scale Processing, Engineering +11

Strained Pseudomorphic Ge<sub>1–<i>x</i></sub>Sn<sub><i>x</i></sub> Multiple Quantum Well Microdisk Using SiN<sub><i>y</i></sub> Stressor Layer

Colleen S. Fenrich, Xiaochi Chen, Robert Chen et al. · ACS Photonics · 2016 · 24 citations

Engineering, Direct Band Gap, Microdisk Photoluminescence +17

GeSn Channel n and p MOSFETs

Suyog Gupta, Robert Chen, Benjamin Vincent et al. · ECS Meeting Abstracts · 2012 · 11 citations · Full text

Electrical Engineering, Abstract Algebra, Engineering +7

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