Concepedia

Tsutomu Osaka

TO

Statistics

Publications

2

Citations

65

H-Index

2

Active since

1998

Tsutomu Osaka is an author specializing in environmental engineering, wastewater treatment, and chemical engineering.

Top concepts

EngineeringWater PurificationChemical EngineeringWastewater TreatmentEnvironmental EngineeringWater TreatmentMaterial ScienceMicrofabricationWaste ManagementEnvironmental Remediation

Publications per year

1998–2007

2

Publications

2

Contamination Removal by Single‐Wafer Spin Cleaning with Repetitive Use of Ozonized Water and Dilute HF

Takeshi Hattori, Tsutomu Osaka, Akira Okamoto et al. · Journal of The Electrochemical Society · 1998 · 49 citations

Chemical Engineering, Wafer Scale Processing, Contamination Removal +14

Environmentally Benign Single-Wafer Spin Cleaning Using Ultra-Diluted HF/Nitrogen Jet Spray Without Causing Structural Damage and Material Loss

Takeshi Hattori, Hideki Hirano, Tsutomu Osaka et al. · IEEE Transactions on Semiconductor Manufacturing · 2007 · 16 citations

Materials Science, Chemical Engineering, Causing Structural Damage +13

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