Concepedia

Sambhu Agarwala

SA

Statistics

Publications

4

Citations

77

H-Index

4

Active since

1992

Affiliations

University of Maryland, College Park(Current)

University of Illinois Urbana-Champaign

University of Maryland, Baltimore County

Sambhu Agarwala is an author at University of Maryland, College Park specializing in materials science, electronic materials, and etching processes.

Publications per year

1992–1999

4

Publications

4

Etching characteristics of Al<i>x</i>Ga1−<i>x</i>As in (NH4)2S<i>x</i> solutions

Jong-Wook Seo, Terry Koker, Sambhu Agarwala et al. · Applied Physics Letters · 1992 · 25 citations

Engineering, Materials Engineering, Materials Science +11

Response surface study of inductively coupled plasma etching of GaAs/AlGaAs in BCl3/Cl2

Sambhu Agarwala, O. King, S. C. Horst et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 20 citations

Engineering, Electrical Engineering, Materials Science +17

Selective reactive ion etching of InGaAs/InAlAs heterostructures in HBr plasma

Sambhu Agarwala, I. Adesida, C. Caneau et al. · Applied Physics Letters · 1993 · 20 citations

Engineering, Materials Engineering, Materials Science +17

High-density inductively coupled plasma etching of GaAs/AlGaAs in BCl3/Cl2/Ar: A study using a mixture design experiment

Sambhu Agarwala, S. C. Horst, O. King et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 12 citations

Engineering, Materials Engineering, Materials Science +17

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