Statistics
Publications
4
Citations
161
H-Index
4
Active since
1964
Affiliations
Tohoku University(Current)
Susumu Saito is an author at Tohoku University specializing in engineering, applied physics, and electrical engineering.
Publications per year
1964–2015
4
4
Ultra Shallow Junction Formation by RTA at High Temperature for Short Heating Cycle Time
Susumu Saito, S. Shishiguchi, A. Mineji et al. · MRS Proceedings · 1998 · 18 citations
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