Statistics
Publications
2
Citations
32
H-Index
2
Active since
1986
Affiliations
NEC (Japan)(Current)
S. Shishiguchi is an author at NEC (Japan) specializing in applied physics, engineering, and calibration.
Publications per year
1986–1998
2
2
Ultra Shallow Junction Formation by RTA at High Temperature for Short Heating Cycle Time
Susumu Saito, S. Shishiguchi, A. Mineji et al. · MRS Proceedings · 1998 · 18 citations
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