Concepedia

Masashi Uematsu

MU

Statistics

Publications

67

Citations

2.1K

H-Index

26

Active since

1984

Affiliations

NTT Basic Research Laboratories(Current)

Keio University

University of Tsukuba

Masashi Uematsu is an author at NTT Basic Research Laboratories specializing in materials science, materials engineering, and engineering.

Publications per year

1984–2018

67

Publications

67

Universal Theory of Si Oxidation Rate and Importance of Interfacial Si Emission

Hiroyuki Kageshima, Kenji Shiraishi, Masashi Uematsu · Japanese Journal of Applied Physics · 1999 · 158 citations

Natural Sciences, Materials Engineering, Materials Science +16

Simulation of boron, phosphorus, and arsenic diffusion in silicon based on an integrated diffusion model, and the anomalous phosphorus diffusion mechanism

Masashi Uematsu · Journal of Applied Physics · 1997 · 114 citations

Engineering, Materials Engineering, Materials Science +17

Experimental Evidence of the Vacancy-Mediated Silicon Self-Diffusion in Single-Crystalline Silicon

Yasuo Shimizu, Masashi Uematsu, Kohei M. Itoh · Physical Review Letters · 2007 · 93 citations

Natural Sciences, Materials Science, Physics +14

Self-diffusion of Si in thermally grown SiO2 under equilibrium conditions

Tomonori Takahashi, Shigeto Fukatsu, Kohei M. Itoh et al. · Journal of Applied Physics · 2003 · 78 citations

Engineering, Materials Engineering, Materials Science +17

Recombination-enhanced impurity diffusion in Be-doped GaAs

Masashi Uematsu, Kazumi Wada · Applied Physics Letters · 1991 · 75 citations

Engineering, Electrical Engineering, Materials Science +17

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