Concepedia

Masanobu Yoshikawa

MY

Statistics

Publications

15

Citations

316

H-Index

12

Active since

1988

Affiliations

Toray Industries, Inc. (Japan)(Current)

Kyoto University

National Institute of Advanced Industrial Science and Technology

Toray (United States)

Masanobu Yoshikawa is an author at Toray Industries, Inc. (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceNanoelectronicsMicroelectronicsSurface ScienceMaterials EngineeringElectrical EngineeringPhysicsThin Films

Publications per year

1988–2016

15

Publications

15

Characterization of anisotropic stress around Si trenches by polarized Raman spectroscopy

Masanobu Yoshikawa, M. Maegawa, Gen Katagiri et al. · Journal of Applied Physics · 1995 · 61 citations

Materials Science, Materials Engineering, Polarization Raman Technique +15

Epitaxial growth of silicon at low temperature by ultrahigh vacuum electron cyclotron resonance plasma chemical vapor deposition

Ichiro Nagai, Takayuki Takahagi, A. Ishitani et al. · Journal of Applied Physics · 1988 · 36 citations

Materials Science, Epitaxial Growth, Engineering +14

Microscopic Degradation Mechanisms in Silicon Photovoltaic Module under Long-Term Environmental Exposure

K. Matsuda, Takeshi Watanabe, Kôichi Sakaguchi et al. · Japanese Journal of Applied Physics · 2012 · 27 citations

Engineering, Degradation Reaction, Photovoltaic System +18

Measurement of temperature-dependent stress in copper-filled silicon vias using polarized Raman spectroscopy

Ryuichi Sugie, Kenichi Kosaka, Hirofumi Seki et al. · Journal of Applied Physics · 2013 · 23 citations · Full text

Engineering, Mechanical Engineering, Residual Stress +17

Characterization of fluorine-doped silicon dioxide film by Raman spectroscopy

Masanobu Yoshikawa, K. Iwagami, N. Morita et al. · Thin Solid Films · 1997 · 22 citations

Engineering, Optical Properties, Silicon On Insulator +5

1–5 of 15