Diego Emilio Serrano

Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

Diego Emilio Serrano, Mohammed Fayyad Zaman, Amir Rahafrooz et al. · Microsystems & Nanoengineering · 2016 · 82 citations · Full text

Bulk-acoustic Wave Gyroscopes, Engineering, Robust Devices +16

Electrostatically tunable piezoelectric-on- silicon micromechanical resonator for real-time clock

Diego Emilio Serrano, Roozbeh Tabrizian, Farrokh Ayazi · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2012 · 35 citations

Electrical Engineering, Engineering, Micromachines +12

Wafer-level vacuum-packaged triaxial accelerometer with nano airgaps

Yaesuk Jeong, Diego Emilio Serrano, V. Keesara et al. · 2013 · 31 citations

Electrical Engineering, Biomedical Sensors, Engineering +15

Substrate-decoupled silicon disk resonators having degenerate gyroscopic modes with Q in excess of 1-million

Ramin Mirjalili, Haoran Wen, Diego Emilio Serrano et al. · 2015 · 30 citations

Materials Science, Photonics, Elliptic Modes +14

Tunable piezoelectric MEMS resonators for real-time clock

Diego Emilio Serrano, Roozbeh Tabrizian, Farrokh Ayazi · 2011 · 30 citations

Electrical Engineering, Vibrations, Engineering +14