Atsuhiko Maeda

Lattice thermal conductivity via homogeneous nonequilibrium molecular dynamics

Atsuhiko Maeda, Toyonori Munakata · Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics · 1995 · 36 citations

Thermal Energy, Engineering, Physics +13

Wafer-scale layer transfer of GaAs and Ge onto Si wafers using patterned epitaxial lift-off

Eiko Mieda, Tatsuro Maeda, Noriyuki Miyata et al. · Japanese Journal of Applied Physics · 2015 · 23 citations

Electrical Engineering, Wafer Scale Processing, Engineering +15

Room temperature wafer bonding of metal films using flattening by thermal imprint process

Yuichi Kurashima, Atsuhiko Maeda, Ryo Takigawa et al. · Microelectronic Engineering · 2013 · 17 citations

Materials Science, Materials Engineering, Electrical Engineering +12

Replication of atomically smooth surface shape onto electroplated Au patterns by lift-off process and room-temperature Au–Au bonding in atmospheric air

Yuichi Kurashima, Atsuhiko Maeda, Hideki Takagi · Microelectronic Engineering · 2014 · 17 citations

Materials Science, Atmospheric Air, Engineering +11

Room temperature wafer direct bonding of smooth Si surfaces recovered by Ne beam surface treatments

Yuichi Kurashima, Atsuhiko Maeda, Hideki Takagi · Applied Physics Letters · 2013 · 13 citations

Materials Engineering, Materials Science, Wafer Scale Processing +15