Yoichi Yoshida

Radiation-Induced Acid Generation Reactions in Chemically Amplified Resists for Electron Beam and X-Ray Lithography

Takahiro Kozawa, Yoichi Yoshida, Mitsuru Uesaka Tagawa · Japanese Journal of Applied Physics · 1992 · 249 citations

Materials Science, Onium Salts, Chemically Amplified Resists +15

Pulse radiolysis study of concentrated sulfuric acid solutions. Formation mechanism, yield and reactivity of sulfate radicals

Peiyun Jiang, Yosuke Katsumura, Ryuji Nagaishi et al. · Journal of the Chemical Society Faraday Transactions · 1992 · 126 citations

Chemical Engineering, Engineering, Fast Formation Process +12

Influence of diluent on radiolysis of amides in organic solution

Yumi Sugo, Yoshinobu Izumi, Yoichi Yoshida et al. · Radiation Physics and Chemistry · 2006 · 91 citations

Chemical Engineering, Derivative (Chemistry), Engineering +6

Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process (II) –Relation between Resist Space Resolution and Space Distribution of Ionic Species–

Akinori Saeki, Takahiro Kozawa, Yoichi Yoshida et al. · Japanese Journal of Applied Physics · 2002 · 75 citations

Response Function, Engineering, Electron-beam Lithography +19

Electronic Structure of Radical Anions and Cations of Polysilanes with Structural Defects

Shu Seki, Yoichi Yoshida, Seiichi Tagawa et al. · Macromolecules · 1999 · 72 citations

Engineering, Organic Electronics, Radical Cations +20