Concepedia
1
Publications
249
Citations
H-Index
1992
Active since
Affiliations
The University of Tokyo(Current)
Mitsuru Uesaka Tagawa is an author at The University of Tokyo specializing in applied physics, x-ray spectroscopy, and photochemistry.
Top concepts
ChemistryEngineeringPhotochemistryApplied PhysicsMaterial ScienceX-ray Spectroscopy
Publications per year
1992–1992
Radiation-Induced Acid Generation Reactions in Chemically Amplified Resists for Electron Beam and X-Ray Lithography
Takahiro Kozawa, Yoichi Yoshida, Mitsuru Uesaka Tagawa · Japanese Journal of Applied Physics · 1992 · 249 citations
Materials Science, Onium Salts, Chemically Amplified Resists +15
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