Statistics
Publications
13
Citations
253
H-Index
11
Active since
2013
Liuhong Ma is an author at Chinese Academy of Sciences specializing in semiconductor devices, engineering, and materials science.
Publications per year
2013–2022
13
13
Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators
Jian Yang, Chaowei Si, Guowei Han et al. · Micromachines · 2015 · 28 citations · Full text
Engineering, Manufacturing Engineering, Materials Science +17
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