Statistics
Publications
11
Citations
295
H-Index
10
Active since
2010
Jian Yang is an author at Chinese Academy of Sciences specializing in engineering, microelectromechanical systems, and electrical engineering.
Publications per year
2010–2023
11
11
Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications
Meng Zhang, Jian Yang, Chaowei Si et al. · Micromachines · 2015 · 48 citations · Full text
Research on Wafer-Level MEMS Packaging with Through-Glass Vias
Fan Yang, Fan Yang, Guowei Han et al. · Micromachines · 2018 · 30 citations · Full text
Engineering, Mechanical Engineering, Microelectromechanical Systems +13
Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators
Jian Yang, Chaowei Si, Guowei Han et al. · Micromachines · 2015 · 28 citations · Full text
Engineering, Manufacturing Engineering, Materials Science +17
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