Statistics
Publications
3
Citations
58
H-Index
3
Active since
2008
Affiliations
Cheng-Yu Chang is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in engineering, resist contrast, and immersion lithography.
Publications per year
2008–2012
3
3
Photobase generator and photo decomposable quencher for high-resolution photoresist applications
Chao-Hsuan Wang, Cheng-Yu Chang, Yao-Ching Ku · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 12 citations
Engineering, Electrical Engineering, Materials Engineering +10
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