Concepedia

Shailesh Sharma

SS

3

Publications

36

Citations

3

H-Index

2014

Active since

Affiliations

Impedans (Ireland)(Current)

Dublin City University

Shailesh Sharma is an author at Impedans (Ireland) specializing in instrumentation, engineering, and pulse power.

Top concepts

EngineeringInstrumentationCalibrationPulse PowerApplied PhysicsMicroelectronicsElectrical EngineeringPhysicsEducationMeasurement

Publications per year

2014–2016

3

Publications

3

Measurement of deposition rate and ion energy distribution in a pulsed dc magnetron sputtering system using a retarding field analyzer with embedded quartz crystal microbalance

Shailesh Sharma, David Gahan, Paul Scullin et al. · Review of Scientific Instruments · 2016 · 14 citations

Materials Science, Electrical Engineering, Electronic Instrumentation +14

Ion angle distribution measurement with a planar retarding field analyzer

Shailesh Sharma, David Gahan, Paul Scullin et al. · Review of Scientific Instruments · 2015 · 12 citations

Engineering, Measurement, Education +20

A spatially resolved retarding field energy analyzer design suitable for uniformity analysis across the surface of a semiconductor wafer

Shailesh Sharma, David Gahan, S Kechkar et al. · Review of Scientific Instruments · 2014 · 10 citations

Semiconductor Wafer, Engineering, Wafer Scale Processing +16

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