Concepedia

S Kechkar

SK

5

Publications

89

Citations

5

H-Index

2013

Active since

Affiliations

Dublin City University(Current)

S Kechkar is an author at Dublin City University specializing in engineering, applied physics, and physics.

Top concepts

EngineeringApplied PhysicsPhysicsChemistrySpectroscopyInstrumentationNatural SciencesPhysical ChemistryChemical KineticsPlasma Diagnostics

Publications per year

2013–2017

5

Publications

5

Use of particle-in-cell simulations to improve the actinometry technique for determination of absolute atomic oxygen density

Jim Conway, S Kechkar, N O' Connor et al. · Plasma Sources Science and Technology · 2013 · 32 citations

Engineering, Atomic Emission Spectroscopy, Microscopy +20

Investigation of the electron kinetics in O<sub>2</sub>capacitively coupled plasma with the use of a Langmuir probe

S Kechkar, P. Swift, Seán Kelly et al. · Plasma Sources Science and Technology · 2017 · 18 citations

Langmuir Probe, Chemical Kinetics, Engineering +22

Investigation of atomic oxygen density in a capacitively coupled O<sub>2</sub>/SF<sub>6</sub>discharge using two-photon absorption laser-induced fluorescence spectroscopy and a Langmuir probe

S Kechkar, P. Swift, Jim Conway et al. · Plasma Sources Science and Technology · 2013 · 17 citations

Langmuir Probe, Engineering, Atomic Emission Spectroscopy +16

Investigation of absolute atomic fluorine density in a capacitively coupled SF<sub>6</sub>/O<sub>2</sub>/Ar and SF<sub>6</sub>/Ar discharge

S Kechkar, Sharath Babu, P. Swift et al. · Plasma Sources Science and Technology · 2014 · 12 citations

Engineering, Atomic Emission Spectroscopy, Chemistry +19

A spatially resolved retarding field energy analyzer design suitable for uniformity analysis across the surface of a semiconductor wafer

Shailesh Sharma, David Gahan, S Kechkar et al. · Review of Scientific Instruments · 2014 · 10 citations

Semiconductor Wafer, Engineering, Wafer Scale Processing +16

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