Mengdi Yang

Hot‐Wire Assisted ALD: A Study Powered by In Situ Spectroscopic Ellipsometry

Alexey Y. Kovalgin, Mengdi Yang, Sourish Banerjee et al. · Advanced Materials Interfaces · 2017 · 32 citations · Full text

Aluminium Nitride, Optical Materials, Engineering +20

Low-resistivity α-phase tungsten films grown by hot-wire assisted atomic layer deposition in high-aspect-ratio structures

Mengdi Yang, Antonius A. I. Aarnink, Jurriaan Schmitz et al. · Thin Solid Films · 2017 · 20 citations · Full text

Materials Science, Materials Engineering, Engineering +9

Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor

Mengdi Yang, Antonius A. I. Aarnink, Alexey Y. Kovalgin et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 17 citations · Full text

Engineering, Tungsten Films, Chemistry +16

Hot-wire assisted ALD of tungsten films:<i>In-situ</i>study of the interplay between CVD, etching, and ALD modes

Mengdi Yang, Antonius A. I. Aarnink, Alexey Y. Kovalgin et al. · physica status solidi (a) · 2015 · 14 citations · Full text

Engineering, Tungsten Films, Thin Film Process Technology +17

Inherently area-selective hot-wire assisted atomic layer deposition of tungsten films

Mengdi Yang, Antonius A. I. Aarnink, Jurriaan Schmitz et al. · Thin Solid Films · 2018 · 14 citations · Full text

Materials Science, Materials Engineering, Engineering +8