Concepedia
1
Publications
18
Citations
H-Index
2018
Active since
Affiliations
IMEC(Current)
Atish Rathore is an author at IMEC.
Publications per year
2018–2018
Unraveling the role of photons and electrons upon their chemical interaction with photoresist during EUV exposure
Yannick Vesters, Atish Rathore, Pieter Vanelderen et al. · 2018 · 18 citations · Full text
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