Statistics
Publications
3
Citations
127
H-Index
3
Active since
2021
Affiliations
Hongik University(Current)
Tomohiro Tsugawa is an author at Hongik University specializing in materials chemistry, atomic layer deposition, and precursor chemistry.
Publications per year
2021–2022
3
3
Atomic Layer Deposition of Ru for Replacing Cu-Interconnects
Yohei Kotsugi, Seung‐Min Han, Youn‐Hye Kim et al. · Chemistry of Materials · 2021 · 70 citations
Natural Sciences, Materials Engineering, Materials Science +16
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