Tanya A. Atanasova

Wafer-scale Cu plating uniformity on thin Cu seed layers

Yang Liu, Tanya A. Atanasova, Aleksandar Radisic et al. · Electrochimica Acta · 2013 · 29 citations

Materials Science, Materials Engineering, Wafer-scale Cu +7

Characterization of Threading Dislocations in Thin Germanium Layers by Defect Etching: Toward Chromium and HF-Free Solution

Laurent Souriau, Tanya A. Atanasova, V. Terzieva et al. · Journal of The Electrochemical Society · 2008 · 22 citations

Materials Science, Dislocation Densities, Defect Etching +15

Adsorption/Desorption of Suppressor Complex on Copper: Description of the Critical Potential

Tanya A. Atanasova, Katrien Strubbe, Philippe M. Vereecken · ECS Transactions · 2011 · 13 citations

Damascene Copper Plating, Engineering, Critical Potential +16