Statistics
Publications
1
Citations
10
H-Index
1
Active since
2010
Affiliations
STMicroelectronics (France)(Current)
Michel Vitalis is an author at STMicroelectronics (France) specializing in photolithography, chemistry, and chemical reaction mechanisms.
Publications per year
2010–2010
1
1
Nicolas Pic, Christophe Martin, Michel Vitalis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 10 citations
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