Concepedia
3
Publications
147
Citations
H-Index
2011
Active since
Affiliations
Yeungnam University(Current)
Samsung (South Korea)
University of Ulsan
Sang-Hyeok Choi is an author at Yeungnam University specializing in thin films, surface science, and materials science.
Top concepts
Thin FilmsEngineeringNanotechnologyApplied PhysicsSurface ScienceMaterial Science
Publications per year
2011–2013
Thermal Atomic Layer Deposition (ALD) of Ru Films for Cu Direct Plating
Sang-Hyeok Choi, Taehoon Cheon, Soo‐Hyun Kim et al. · Journal of The Electrochemical Society · 2011 · 59 citations · Full text
Atomic layer deposition of ruthenium (Ru) thin films using ethylbenzen-cyclohexadiene Ru(0) as a seed layer for copper metallization
Seungmin Yeo, Sang-Hyeok Choi, Jiyoon Park et al. · Thin Solid Films · 2013 · 54 citations
Materials Science, Epitaxial Growth, Engineering +10
Atomic Layer Deposition of RuAlO Thin Films as a Diffusion Barrier for Seedless Cu Interconnects
Taehoon Cheon, Sang-Hyeok Choi, Soo‐Hyun Kim et al. · Electrochemical and Solid-State Letters · 2011 · 34 citations
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