Eun‐Hee Cirlin

Influence of O+2 energy, flux, and fluence on the formation and growth of sputtering-induced ripple topography on silicon

John J. Vajo, Robert E. Doty, Eun‐Hee Cirlin · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 110 citations

Engineering, Microscopy, O+2 Energy +19

Ion-induced topography, depth resolution, and ion yield during secondary ion mass spectrometry depth profiling of a GaAs/AlGaAs superlattice: Effects of sample rotation

Eun‐Hee Cirlin, John J. Vajo, Robert E. Doty et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 68 citations

Sample Rotation, Engineering, Microscopy +20

Interlaboratory comparison of the depth resolution in sputter depth profiling of Ni/Cr multilayers with and without sample rotation using AES, XPS, and SIMS

S. Hofmann, A. Zalar, Eun‐Hee Cirlin et al. · Surface and Interface Analysis · 1993 · 62 citations

Materials Science, Layer Thickness, Surface Characterization +15

On the alteration of Allende chondrules and the formation of matrix

R. M. Housley, Eun‐Hee Cirlin · NASA Technical Reports Server (NASA) · 1983 · 50 citations

Materials Science, Inorganic Chemistry, Abundant Opaque Inclusions +11

Theory of improved resolution in depth profiling with sample rotation

R. Mark Bradley, Eun‐Hee Cirlin · Applied Physics Letters · 1996 · 42 citations

High Resolution, Sample Rotation, Engineering +19