Statistics
Publications
16
Citations
399
H-Index
12
Active since
1957
Affiliations
T. Kato is an author at Mitsubishi Electric (Japan) specializing in materials science, engineering, and electronic materials.
Publications per year
1957–2017
16
16
Investigation of kilovolt electron energy dissipation in solids
Takeshi Matsukawa, Ryōsuke Shimizu, Kazuaki Harada et al. · Journal of Applied Physics · 1974 · 54 citations
Focused ion beam lithography and its application to submicron devices
Hiroaki Morimoto, Yōichi Sasaki, Kazunori Saitoh et al. · Microelectronic Engineering · 1986 · 40 citations
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