Fumio Nagata is an author at Hitachi (Japan) specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial SciencePhysicsMicroscopyCrystallographySurface ScienceMicroelectronicsMedicineChemistry
Publications per year
1967–1989
12
12
Hiroshi Kakibayashi, Fumio Nagata · Japanese Journal of Applied Physics · 1986 · 56 citations
Aluminium Nitride, Engineering, Electron-beam Lithography +17
Hiroshi Kakibayashi, Fumio Nagata, Yoshifumi Katayama et al. · Japanese Journal of Applied Physics · 1984 · 42 citations
Materials Science, Defect Tolerance, Electrical Engineering +14
Rows per page
1–5 of 12