Concepedia

C. M. Ke

CM

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Publications

1

Citations

11

H-Index

1

Active since

2011

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

C. M. Ke is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in manufacturing metrology, surface metrology, and cycle time.

ORCID

Publications per year

2011–2011

1

Publications

1

Litho process control via optimum metrology sampling while providing cycle time reduction and faster metrology-to-litho turn around time

K.-H. Chen, Jacky Huang, Wencheng Yang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 11 citations

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