Concepedia
Statistics
Publications
1
Citations
11
H-Index
Active since
2013
Ho-Hyuk Lee is an author specializing in microelectronics, immersion lithography, and process window development.
Publications per year
2013–2013
Patterning challenges of EUV lithography for 1X-nm node DRAM and beyond
Tae-Seung Eom, Hongik Kim, Choon-Ky Kang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 11 citations
Engineering, Computer Engineering, Electrical Engineering +10
1–1 of 1